Opto Diode's SXUV-Series of extreme ultraviolet (EUV) enhanced detectors features superior 13.5nm photolithography capability with stable responsivity in extreme UV exposure from 1nm to 190nm, making them ideal for the most critical measurements of EUV light.
SXUV-Series detectors feature a metal silicide window to address the issue of surface recombination in oxide windows (resulting in loss of 100% internal QE) after receiving several G-rad (SiO2) dose. SXUV series devices have almost infinite radiation hardness to photons and are recommended for the detection of UV/EUV pulse radiation; high photon flux; and when pulse energy density is higher than 0.1 µJ/cm².
| Part Number |
Active Area |
RSh | ID @50V |
C @0V |
Risetime 10-90% |
|
| SXUV Detectors | ||||||
 |
SXUV-Series technology overview | |||||
|
SXUV5 | 2.5mm dia., 5mm² | 20MΩ | - | 1nF | 0.001µs |
|
SXUV20C | 5.01mm dia., 20mm² | 200MΩ | - | 1.55nF | 2µs |
|
SXUV100 | 10x10mm, 100mm² | 20MΩ | - | 15nF | 6µs |
|
SXUV300C | 22.05x15.85mm, 331mm² | 5MΩ | - | 40nF | 6µs |
| SXUV Filtered Detectors | ||||||
|
SXUV100TF1351 | 100mm², 12-18nm, 0.09A/W @ 13.5nm | 10MΩ | - | 250pF | 20ns |
| 1 Optimised for reverse bias operation - low Capacitance and high speed at 12V. | ||||||
| SXUV High Speed Detectors | ||||||
|
SXUV20HS1 | 5.01mm dia., 19mm² | - | 200nF | 2µs | |
| SXUV Quadrant Detectors | ||||||
|
SXUVPS4 | 2.5mm dia., 4 x 1.25mm² | 100MΩ | - | 500nF | - |
|
SXUVPS4C | 2.5mm dia., 4 x 1.25mm² | 100MΩ | - | 0.5nF | 1µs |
|
Sockets |
||||||
|
AXUV100CS | Ceramic socket; SXUV100, 2-pin, 12.5mm spacing | ||||
